LIGHT CONTROL DEVICE AND MANUFACTURING METHOD FOR THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a light control device in which the influence of residual stress is minimized and the flatness of a reflection member is improved and to provide a manufacturing method for the light control device. SOLUTION: The reflection member 10 on which a reflection film 20 is provided is movably fixed with respect to a fixed member 30 with a supporting member 40. The light control device is manufactured by using so called an SOI substrate which is a holding substrate on the surface of which an oxidized layer and a semiconductor thin film are successively laminated, selectively removing the semiconductor thin film leaving a region in which the reflection member 10 is to be formed and selectively removing the holding substrate and the oxidized layer leaving a region in which a fixing member 30 is to be formed. A preferable thickness of the reflection film 20 is 500 nm or smaller. The flatness of the reflection member 10 is improved by suppressing the warpage of the reflection member 10 due to the residual stress of the reflection film 20. COPYRIGHT: (C)2005,JPO&NCIPI