发明名称 Method for supply of constant-concentration ozonated water
摘要 Problems: To provide an apparatus which allows the ozonated water concentration to be retained and avoids being affected by the fluctuation of the amount of the ozonated water to be used. Solution: A method for the supply of a constant-concentration ozonated water, which comprises employing a unit for producing ozonated water and a system for using the ozonated water at a place separated therefrom, interposing an ozonated water circulating line between the ozonated water producing unit and the place for using the ozonated water, causing the interior of the circulating line to circulate the ozonated water so that the flow rate may be constantly fixed at the outlet of the ozonated water producing unit, monitoring the ozone concentration of the ozonated water in the neighborhood of the outlet, adjusting the amount of an ozone gas supplied to the ozonated water producing unit and/or the concentration of the ozone gas based on the results of the monitoring, further monitoring the amount of the ozonated water used at the place for using the ozonated water, and controlling the amount of the ozonated water to be produced based on the results of this monitoring. Effect: The ozonated water can be used without being discarded even where the use of the ozonated water at the place of use is suspended temporarily. The constant-concentration ozonated water can be produced and supplied and the ozone can be utilized effectively.
申请公布号 EP1538129(A1) 申请公布日期 2005.06.08
申请号 EP20040027411 申请日期 2004.11.18
申请人 SILTRONIC AG 发明人 HAIBARA, TERUO;UEMURA, KENICHI;ADACHI, TAKIO;SHIMOI, YOUICHI
分类号 B08B7/00;C01B13/10;C02F1/00;C02F1/78;G05D7/00;G05D11/08;H01L21/304 主分类号 B08B7/00
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