ETCHED ARTICLE, MOLD STRUCTURE USING THE SAME AND METHOD FOR PRODUCTION THEREOF

摘要

PROBLEM TO BE SOLVED: To provide a forming mold having a smooth surface small in surface roughness to solve the problem that it is difficult to produce an excellent structure when the a forming mold has large surface roughness in the production of the structure having a convexoconcave portion on the surface by molding. SOLUTION: A mold structure is formed by injecting a fluid substance in the forming mold having a concave portion having a predetermined sectional shape; hardening the fluid substance; and releasing the fluid substance from the forming mold. The center-line average roughness Ra of the surface of the mold structure is selected to be not larger than 20 nm, preferably not larger than 8 nm. The center-line average roughness Ra of a portion to contact with the fluid substance of the forming mold is also selected to be not larger than 20 nm, preferably not larger than 8 nm. COPYRIGHT: (C)2005,JPO&NCIPI