| 摘要 |
PROBLEM TO BE SOLVED: To easily prepare a plane TEM sample selectively remaining a specific surface between layers of a sample comprising a multilayer film. SOLUTION: The device for preparing a plane TEM sample comprises a glow discharge emission spectral analysis (GDS) device part 102 and an ion milling device part 103, and sets a control program corresponding to a specific element contained in a sample 5 comprising a multilayer film. A thin-film plane TEM sample is prepared by driving the GDS device part 102 to sputter the sample 5 until a specific surface is exposed while confirming the sputtering depth direction, and then driving the ion milling device part 103 to sputter the sample 5 by ion milling from an opposite surface in a measurement region by the GDS device part 102, thereby selectively remaining a specific surface formed between the layers of the sample 5 comprising a multilayer film without destroying the surface. COPYRIGHT: (C)2005,JPO&NCIPI
|
