Evaporation source

摘要

The present invention relates to an evaporation source. The evaporation source according to the present invention includes a cell (11) retaining an evaporation material (M) therein; a cell cap (12) installed on the upper part of the cell and having a cell cap aperture (12A) for emitting a vaporized evaporation material; an external wall (13) placed in the outside of the cell to support a heating means (13A) set up at the outside of the cell; a cover (15) placed above the cell cap, fixed to the upper end of the external wall, and having a cover aperture (15A) corresponding to the cell cap aperture; and a shut-off plate (16) placed between the cover and the cell cap and having a shut-off plate aperture corresponding to the cell cap aperture and the cover aperture in the center of the shut-off plate.