发明名称 Semiconductor device and method of manufacturing the same
摘要 A semiconductor device comprises a first substrate including an element, a first plug penetrating through the first substrate, made of a conductive material, and electrically connected with the element, a second substrate provided above the first substrate, and electrically connected with the element via the first plug, and a second plug penetrating through the first substrate, made of a non-dielectric material, and being not electrically connected with the second substrate.
申请公布号 US6841469(B2) 申请公布日期 2005.01.11
申请号 US20020327981 申请日期 2002.12.26
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 SAWADA KANAKO;SASAKI KEIICHI
分类号 H01L25/18;H01L21/768;H01L23/48;H01L23/52;H01L25/065;H01L25/07;(IPC1-7):H01L21/476 主分类号 H01L25/18
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