| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an atmospheric pressure plasma treatment device which evenly performs surface treatment with atmospheric pressure plasma. <P>SOLUTION: Two electrode groups of approximately plane shape, having a plurality of round bar shaped electrodes 41, 61, arranged in parallel, are arranged opposingly to each other inside a first chamber and a second chamber for atmospheric pressure plasma, so that a film for atmospheric plasma treatment is arranged between the opposed electrode groups. A slit is provided between the adjacent round bar shaped electrodes 41, 61. Behind the electrode group corresponding to the slit, a plurality of gas injection ports 42, 62 are formed. The gas is injected from the gas injection ports 42, 62 to between the electrodes through the slit. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
