发明名称 METHOD AND PAD FOR POLISHING WAFER
摘要 <p>A method for polishing a wafer capable of effectively preventing the outer peripheral part of the wafer from sagging and a pad for polishing a wafer suitably used for the method of polishing the wafer, the method comprising the step of allowing the principal plane of the wafer to come into slidable contact with the polishing pad formed of nonwoven fabric soaked with resin to mirror-finish the surface, wherein the ratio of the surface roughness to the compressibility of the polishing pad [surface roughness Ra (µm)/compressibility (%)] is 3.8 or more.</p>
申请公布号 WO03038882(A8) 申请公布日期 2004.10.14
申请号 WO2002JP11094 申请日期 2002.10.25
申请人 SHIN-ETSU HANDOTAI CO.,LTD.;RODEL NITTA COMPANY;MASUMURA, HISASHI;TOMII, KAZUYA;ITO, SHIGENAO;ANZAI, KENICHI;INOUE, KENICHI 发明人 MASUMURA, HISASHI;TOMII, KAZUYA;ITO, SHIGENAO;ANZAI, KENICHI;INOUE, KENICHI
分类号 B24B1/00;B24B7/30;B24B37/20;B24B37/24;B24D13/14;H01L21/304;H01L21/306;(IPC1-7):H01L21/304 主分类号 B24B1/00
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