| 摘要 |
PURPOSE: Semiconductor manufacturing equipment having an apparatus for sensing the teaching status of wafer and its method are provided to be capable of checking the teaching state of a flat zone wafer at any time under a predetermined process. CONSTITUTION: A semiconductor manufacturing equipment includes a space change unit(120) having a sensing device for wafer's teaching status which senses whether a flat zone wafer(10) is rotated, or not. The sensing device for wafer's teaching status includes a light emitting and receiving sensor support part(210) spaced apart from each other, a light emitting sensor part installed at the light emitting sensor support part, and a light receiving sensor part installed at the light receiving sensor support part. The sensing device for wafer's teaching status further includes an output part(230) for displaying whether the light transmitted from the light emitting sensor part is detected by the light receiving sensor part, or not.
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