发明名称 Transfer apparatus and accommodating apparatus for semiconductor process, and semiconductor processing system
摘要 An LCD substrate transfer apparatus includes an articulated arm unit attached to a support base, to be rotatable and stretchable/retractable within a horizontal plane. The articulated arm unit has a distal end arm, which reciprocates in a transfer direction upon stretching/retracting operation of the articulated arm unit. A support member is arranged on the distal end arm to support an LCD substrate. The support member is attached to the distal end arm to be reciprocatable in the transfer direction. A pair of temporary shelves for supporting the LCD substrate are disposed to sandwich the support member when the articulated arm unit and support member retract. The LCD substrate is placed on the temporary shelves, and only the articulated arm unit is rotated to switch the transfer directions.
申请公布号 US6709521(B1) 申请公布日期 2004.03.23
申请号 US20000655304 申请日期 2000.09.05
申请人 TOKYO ELECTRON LIMITED 发明人 HIROKI TSUTOMU
分类号 H01L21/68;B25J9/04;H01L21/677;(IPC1-7):C23C16/000;B65G49/07;C23F1/00;H01L21/306 主分类号 H01L21/68
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