FORCE-SENSING DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR BLOCK WHICH CAN BE USED FOR THE DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a force sensing device which can detect acted force, over a wide range with high precision. SOLUTION: The force sensing device 10 is provided with a force-sensing block 22, wherein a resistance part 40 is formed by projecting, and a force transmission block 30. A force interacted on the force transmission block 30 is sensed from change of resistance value of the resistance part 40. In the force-sensing device 10, protrusions 50 lower than the resistance part 40 are arranged. The plurality of protrusions 50 are arranged, in such a manner that contact area between the force transmission block 30 and the protrusions 50 becomes zero, while a force interacted on the force transmission block 30 is from zero to W1, the contact area between the force transmission block 30 and the protrusions 50 becomes S1while the force interacted on the force transmission block 30 is from W1to W2; and the contact area between the force transmission block 30 and the protrusions 50 becomes S2larger than S1, when the force acting on the force transmission block 30 is at least W2. COPYRIGHT: (C)2004,JPO