Stage apparatus and its driving method, exposure apparatus and device manufacturing method

摘要

The electromagnetic units (226a,226b) generate moving force in a predetermined direction by application of electric current to an exciting coil. The controller determines directions of the electric current applied to respective exciting coils upon selective application of the electric current to the exciting coils. Independent claims are also included for the following: (1) control method for stage apparatus; (2) exposure apparatus; (3) semiconductor device manufacturing method; and (4) method of moving stage in stage apparatus.