发明名称 |
Production of a quartz glass body used e.g. in semiconductor production devices comprises using a burner arrangement which passes through a path sections for twisting media feed lines to the right and to the left |
摘要 |
Production of a quartz glass body comprises using a burner arrangement (5) which passes through a path section for twisting media feed lines (9) to the right and a path section for twisting media lines to the left. An Independent claim is also included for a device for carrying out the process.
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申请公布号 |
DE10251390(A1) |
申请公布日期 |
2004.02.26 |
申请号 |
DE20021051390 |
申请日期 |
2002.11.01 |
申请人 |
HERAEUS TENEVO AG |
发明人 |
HUENERMANN, MICHAEL |
分类号 |
C03B37/014;(IPC1-7):C03B19/01;C03B20/00;C03B37/018 |
主分类号 |
C03B37/014 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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