发明名称 Production of a quartz glass body used e.g. in semiconductor production devices comprises using a burner arrangement which passes through a path sections for twisting media feed lines to the right and to the left
摘要 Production of a quartz glass body comprises using a burner arrangement (5) which passes through a path section for twisting media feed lines (9) to the right and a path section for twisting media lines to the left. An Independent claim is also included for a device for carrying out the process.
申请公布号 DE10251390(A1) 申请公布日期 2004.02.26
申请号 DE20021051390 申请日期 2002.11.01
申请人 HERAEUS TENEVO AG 发明人 HUENERMANN, MICHAEL
分类号 C03B37/014;(IPC1-7):C03B19/01;C03B20/00;C03B37/018 主分类号 C03B37/014
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