| 摘要 |
PROBLEM TO BE SOLVED: To reduce ruggedness on the exposed surface of conductive paste with which a through hole of a ceramic green sheet is filled and to improve the electric connection reliability and mechanical connection reliability of a through conductor obtained by sintering the conductive paste. SOLUTION: The ceramic green sheet 1 in which the through hole 2 is formed is put on a porous undersheet 3 containing fluororesin at least at an upper surface layer. While sucking the green sheet 1 from the lower surface side through the under sheet 3, the conductive paste 4 is charged from the upper surface side of the green sheet 1 into the through hole 2, and then the undersheet 3 is removed from the green sheet 1. COPYRIGHT: (C)2004,JPO |
