TEMPERATURE CONTROL APPARATUS USED IN SEMICONDUCTOR SUBSTRATE ALIGN SYSTEM

摘要

PURPOSE: A temperature control apparatus used in a semiconductor substrate align system is provided to efficiently control the temperature of a semiconductor substrate that increases by a light emitting unit of an edge sensor and a lamp of a mark sensor, by supplying air to the first portion of the substrate adjacent to the edge sensor and the second portion of the substrate adjacent to the mark sensor. CONSTITUTION: An air spray head(210) sprays air on the semiconductor substrate(900) to control the temperature of the semiconductor substrate disposed between the edge sensor(250) and the mark sensor(260). The air spray head sprays the first air of the first flow rate on the first portion of the substrate adjacent to the edge sensor, the second air of the second flow rate on the second portion of the substrate adjacent to the mark sensor, and the third air of the third flow rate on the center of the substrate. The first flow rate and the second flow rate are greater than the third flow rate.