ELEMENT DISTRIBUTION OBSERVING METHOD AND DEVICE THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide an element distribution observing method and a device therefor capable of suppressing the generation of artifacts caused by the thickness or density of a material and artifacts caused by diffraction contrast. SOLUTION: Electron beam intensities are found with respect to three different energy loss areas in total, that is, two energy loss areas including no core loss electrons and one energy loss area including core loss electrons, and element distribution is found based on the three areas and the electron beam intensities. COPYRIGHT: (C)2004,JPO