| 摘要 |
PROBLEM TO BE SOLVED: To provide a compact high-pressure gas supply device which supplies a gas of large flow rate with high pressure. SOLUTION: This high-pressure gas supply device comprises a plurality of extreme cold vessels, an extreme cold vessel for pressurization for supplying a pressurized gas to the plurality of extreme cold vessels, the piping for guiding the high-pressure gas in the extreme cold vessel for pressurization to the extreme cold vessels as the vessels for gas supplying, and an evaporator for vaporizing the liquefied gas flowing out of the extreme cold vessel. The extreme cold vessel for pressurization is preferably provided with a heat exchanger on its outer part, a cold gas in the extreme cold vessel for pressurization is pressurized by the gas heat exchanged by the heat exchanger to be supplied to the vessel for gas supply. A plurality of combinations of the plurality of extreme cold vessel for gas supply and the single extreme cold vessel for pressurization are arranged in parallel to be used while being properly switched. COPYRIGHT: (C)2004,JPO
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