| 发明名称 |
FLUORINATED MOLECULES AND METHODS OF MAKING AND USING SAME |
| 摘要 |
Provided are polymers derived from fluoroalkyl norbornenes, fluorinated crotonates, fluorinated allyl alcohols, and combinations of two or more thereof for use in a wide variety of applications, including photoresist compositions. Also provided are methods for producing the fluoroalkyl norbornenes, fluorinated crotonates, and fluorinated allyl alcohols for use in the present polymers. |
| 申请公布号 |
WO03073169(A2) |
申请公布日期 |
2003.09.04 |
| 申请号 |
WO2003US05142 |
申请日期 |
2003.02.21 |
| 申请人 |
HONEYWELL INTERNATIONAL INC. |
发明人 |
POSS, ANDREW;NALEWAJEK, DAVID;DEMMIN, TIMOTHY, R.;NAIR, HARIDASAN, K. |
| 分类号 |
C07C29/147;C07C67/307;C07C67/317;C07C67/343;C08F16/04;C08F20/10;C08F20/22;C08F32/00;C08F32/08;C08G61/06;C08G61/08;G03F7/004;G03F7/039;H01L21/027 |
主分类号 |
C07C29/147 |
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