| 摘要 |
<p>A vacuum exhaust system comprising a vacuum chamber (1); means for introducing a gas into the vacuum chamber; a main pump (3) for exhausting the vacuum chamber and reducing a pressure of the vacuum chamber to a desired pressure; an auxiliary pump (5) disposed downstream from the main pump; and piping (4) for connecting them, wherein an outer diameter of connecting piping as a connection between the main pump and the auxiliary pump is 1/2 inch (12.7 mm) or less; and a length of the connecting piping and capability of the auxiliary pump are combined so that a back pressure of the main pump becomes 5 Torr or more. This vacuum exhaust system can realize cost reduction through a saving in entire space, simplification of piping construction work, and so on. <IMAGE></p> |
