| 摘要 |
PROBLEM TO BE SOLVED: To enable to manufacture an oxidation resistance reactive solder and the solder material in order to obtain excellent joining with high reliability of ceramics and a metal. SOLUTION: A metal composite layer having an inner region and a surface region is formed by actively providing reactive atoms of higher concentration (a 3B group, a 4B group, and rare earth elements or the like) to the surface region compared with the inner region and it is made to be the solder material. 1) An ion implantation method, 2) a clad method, 3) coating by an immersion method, 4) accumulation of the coating layer, and 5) electroplating or the like may be used for the formation of the composite layer. COPYRIGHT: (C)2003,JPO
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