| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for detecting a reference mark position in which even when strained in an image obtained by imaging an object, a reference mark disposing position on the object can be accurately detected. SOLUTION: The method for detecting the reference mark position comprises the steps of dividing the image 82 obtained by imaging the object into a plurality of areas 83, imparting an arithmetic value relating to a real dimension on the object at a pixel size in the image 82 to each area 83, deriving the pixel 85 corresponding to the reference mark 13 in the image 82 obtained by imaging the object, identifying where area 83 the pixel 85 is disposed, and deriving the disposing position of the mark 13 on the object from the position of the pixel 85 corresponding to the mark 13 in the image 82 by using the arithmetic value related to the area 83. COPYRIGHT: (C)2003,JPO
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