Lens structure for applying electrons to transfer areas of an object's surface into an image surface has a laterally sliding optical axis for corpuscular rays.

摘要

An optical axis (5) for a cylindrical lens defines the position of a centered object field (7) in an object surface (6). A second slit diaphragm (SSD) (8) between the object surface and a first slit diaphragm (FSD) (2) serves to delimit the range towards the object for a quadrupolar field generated in the FSD. The potential of the SSD is chosen as equal to the average potential of the FSD.