发明名称 |
CAPACITIVE TRANSDUCER WITH ELECTROSTATIC ACTUATION |
摘要 |
<p>High precision force imparting and/or a force (including weight) and displacement measuring/indicating device which includes a multi-plate capacitor transducer system. The transducer may be used for both applying and measuring the applied force during microindentation or micro hardness testing, and for imaging before and after the testing to achieve an atomic force microscope type image of a surface topography before and after indentation testing.</p> |
申请公布号 |
EP0792437(B1) |
申请公布日期 |
2003.05.14 |
申请号 |
EP19950939061 |
申请日期 |
1995.11.02 |
申请人 |
HYSITRON INCORPORATED |
发明人 |
BONIN, WAYNE, A. |
分类号 |
G01B7/00;G01B7/16;G01B7/34;G01B21/30;G01D5/24;G01D5/241;G01G7/06;G01L1/14;G01N3/02;G01N3/06;G01N3/40;G01N3/42;G01P15/13;G01Q10/04;G01Q10/06;(IPC1-7):G01B5/28;H01G7/00 |
主分类号 |
G01B7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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