发明名称 TUNNEL JUNCTION DEVICE AND METHOD OF FABRICATING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a tunnel junction device having good under-damp characteristic and a method of fabricating the same. SOLUTION: A superconducting device 100 comprises a substrate 101 formed of an oxide such as LSAT (La-Sr-Al-Ta-O) or magnesium oxide (MgO), a superconducting lower electrode 102 formed of high-temperature superconductor such as YBCO (Y-Ba2 -Cu3 -O7-x ), a barrier layer 103 obtained by conducting surface process to the superconducting lower electrode 102, a superconducting upper electrode 104 formed of a high temperature superconductor such as YBCO (Y-Ba2 -Cu3 -O7-x ), and a high dielectric constant insulator 105 formed of a high dielectric constant material such as STO (Sr-Ti-O3 ) or BTO (Ba-Ti-O3 ) and is provided closely to the junction area with between the superconducting lower electrode 102 and superconducting upper electrode 104.
申请公布号 JP2003115616(A) 申请公布日期 2003.04.18
申请号 JP20010308870 申请日期 2001.10.04
申请人 FUJITSU LTD 发明人 HARADA NAOKI;NAMIGASHIRA TSUNEHIRO
分类号 H01L39/22;H01L39/24;(IPC1-7):H01L39/22 主分类号 H01L39/22
代理机构 代理人
主权项
地址