| 摘要 |
A capacitance-type external-force detecting device includes a substrate (2), a moveable unit (7) which is supported by the substrate (2) via a supporting beam (6) and which can be displaced in the detecting direction, a comb-shaped fixed electrode (13) provided on the substrate (2) and including a plurality of fixed electrode units (13B) spaced in the detecting direction, a comb-shaped moveable electrode (14) provided on the moveable unit and including a plurality of moveable-side electrode units (14B) provided between the corresponding fixed electrode units (13B) so that the moveable-side electrode units (14B) are meshed with the corresponding fixed electrode units (13B), and a capacitance-detecting unit for detecting the displacement amount of the moveable part, at the time when the external force causes the moveable unit to be displaced in the detecting direction, as the variation in the ratio of the overall capacitance between the fixed electrode units (13B) and the moveable electrode units (14B) and for outputting a voltage signal substantially in proportion thereto. <IMAGE> |
