SCALABLE, HIERARCHICAL CONTROL FOR COMPLEX PROCESSES

摘要

The present invention provides a method and system for complex process optimization utilizing metrics, operational variables, or both, of one or more process steps and optimization of one or more of these process step parameters with respect to a cost function for the parameter. In one embodiment, the invention provides a scalable, hierarchical optimization method utilizing optimizations at one process level as inputs to an optimization of a higher of lower process level.