| 摘要 |
To reduce a loss by exhibiting an exhaust performance to the maximum when a temperature of a rotary vane is within an allowable value, maintain the exhaust performance by suppressing a variation in the number of revolutions of a turbo molecular pump even when a gas load varies, and prevent a thermal deterioration of the rotary vane when a temperature of the rotary vane exceeds the allowable value. A driver output set revolution speed judging unit (5) judges a maximum possible driver output or sets the number of revolutions on the basis of signals from a rotary vane temperature sensor (1), revolution speed sensor (2), motor current sensor (3) and an axial electromagnet current sensor (4) when a temperature of a rotary vane is within an allowable value. A driver output switching unit (6) changes a turbo molecular pump driving output of a motor driver (8) on the basis of a signal from the driver output set revolution speed judging unit (5). Also, a revolution speed compensation unit (7) changes the number of revolutions, a which the turbo molecular pump is driven. <IMAGE> |
