发明名称 Semiconductor device and method for manufacturing the same
摘要 A semiconductor device comprising a semiconductor substrate, and a plurality of capacitors formed on the semiconductor substrate. The capacitors comprise a plurality of lower electrodes formed on the semiconductor substrate, a ferroelectric film formed continuously covering the plurality of lower electrodes, and an upper electrode formed on the surface of the ferroelectric film, wherein each of the capacitors is formed for each of the plurality of lower electrode.
申请公布号 US6459111(B1) 申请公布日期 2002.10.01
申请号 US20000609712 申请日期 2000.06.30
申请人 发明人
分类号 H01L27/04;H01L21/02;H01L21/822;H01L21/8242;H01L21/8246;H01L27/105;H01L27/108;(IPC1-7):H01L29/72 主分类号 H01L27/04
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