| 发明名称 |
FOCUSED ION BEAM DEVICE AND METHOD OF WORKING USING THE SAME |
| 摘要 |
PROBLEM TO BE SOLVED: To work plural samples in a short period of time by using a focused ion beam device. SOLUTION: A signal component for scanning in the processing range and a signal component synchronizing with the movement of the movement stage are superposed in a scanning signal of the ion beam. A sample is worked by using such a scanning signal while moving the stage of the sample.
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| 申请公布号 |
JP2002270128(A) |
申请公布日期 |
2002.09.20 |
| 申请号 |
JP20010067114 |
申请日期 |
2001.03.09 |
| 申请人 |
SEIKO INSTRUMENTS INC |
发明人 |
ADACHI TATSUYA;FUJII TOSHIAKI;SUGIYAMA YASUHIKO |
| 分类号 |
H01J37/20;H01J37/147;H01J37/30;H01J37/305;H01J37/317;H01L21/302;(IPC1-7):H01J37/317;H01L21/306 |
主分类号 |
H01J37/20 |
| 代理机构 |
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| 主权项 |
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