Method of making a resistor, method of making a diode, and SRAM circuitry and other integrated circuitry

摘要

Disclosed are methods of forming resistors and diodes from semiconductive material, and static random access memory (SRAM) cells incorporating resistors, and to integrated circuitry incorporating resistors and diodes. A node to which electrical connection is to be made is provided. An electrically insulative layer is provided outwardly of the node. An opening is provided in the electrically insulative layer over the node. The opening is filed with semiconductive material which depending on configuration serves as one or both of a vertically elongated diode and resistor.