| 摘要 |
<p>An electron beam detector which uses a light guide to optically couple the fluorescence emitting surface of a compound semiconductor substrate with the light incident surface of a photodetector, and physically connects the compound semiconductor substrate with the photodetector to thereby integrate the compound semiconductor substrate with the photodetector. When the compound semiconductor substrate converts incident electrons into fluorescence, the light guide conducts the fluorescence to the photodetector for detection by the photodetector, thereby detecting the incident electron beam.</p> |
