| 摘要 |
PURPOSE: A vacuum intake breaking apparatus of a vacuum chuck is provided to easily supply an element and improve working efficiency by quickly opening/closing a vacuum status of a vacuum line. CONSTITUTION: A vacuum line(11) is formed at a vacuum chuck(10). A plurality of vacuum chucks(10) are arranged at an upper edge of a rotating plate(20) at regular intervals. A damper(30) is installed at the vacuum line(11) of the vacuum chuck(10). A rotating cylinder(40) is installed to contact with an outer periphery of the vacuum line(11). A pin(50) is locked to the rotating cylinder(40). When the rotating cylinder(40) operates to rotate the damper(30) so that an opening/closing operation in a vacuum status is quickly performed. Since the number of the vacuum chucks(10) is increased, an element supply according to a high speed operation of equipment is easily performed and a working performance is improved. |
