METHODS AND APPARATUSES FOR TRENCH DEPTH DETECTION AND CONTROL,申请号EP20000977281-传众专利搜索

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发明名称	METHODS AND APPARATUSES FOR TRENCH DEPTH DETECTION AND CONTROL
摘要
申请公布号	EP1218936(A2)	申请公布日期	2002.07.03
申请号	EP20000977281	申请日期	2000.09.27
申请人	LAM RESEARCH CORPORATION	发明人	MUNDT, RANDALL, S.
分类号	G01B11/22;H01L21/00;H01L21/66;(IPC1-7):H01L21/66	主分类号	G01B11/22
代理机构		代理人
主权项
地址

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