发明名称 Method and apparatus for controlling a stepper
摘要 In one illustrative embodiment, a method is provided that comprises energizing a light source to provide light having a preselected intensity. A first photosensor, which is capable of delivering a first signal indicative of the intensity of the light source, is exposed to the light source. A second photosensor, which is also capable of delivering a second signal indicative of the intensity of the light source, is also exposed to the light source. Thereafter, the first and second signals are compared, and an error signal is delivered in response to detecting a significant difference between the first and second signals.
申请公布号 US2002064719(A1) 申请公布日期 2002.05.30
申请号 US20000726995 申请日期 2000.11.30
申请人 TOPRAC ANTHONY JOHN;EDWARDS RICHARD DAVID;DOSS CURTIS WARREN 发明人 TOPRAC ANTHONY JOHN;EDWARDS RICHARD DAVID;DOSS CURTIS WARREN
分类号 G03F7/20;(IPC1-7):G03C5/00;G03B27/74;G03B27/32 主分类号 G03F7/20
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