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发明名称
Vorrichtung zur Kontrolle und/oder Bearbeitung eines Musters
摘要
申请公布号
DE69900557(T2)
申请公布日期
2002.05.23
申请号
DE1999600557T
申请日期
1999.08.16
申请人
ADVANTEST CORP., TOKIO/TOKYO
发明人
TAKESHITA, SHINPEI;FROSIEN, DR.
分类号
G12B5/00;B81C5/00;G01C19/00;G01N23/225;G01Q30/04;G05D3/12;(IPC1-7):G01C21/18;G05D19/02
主分类号
G12B5/00
代理机构
代理人
主权项
地址
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