STRUCTURE OF MASKING BLADE OF STEPPER

摘要

PURPOSE: A structure of a masking blade of a stepper is provided to reduce generation of particles in the edge of a wafer by making an unnecessary chip not included in a device map, and to maximize the number of total dies of the wafer by including all necessary chips in the device map. CONSTITUTION: The structure of the masking blade of the stepper is composed of 8 masking blade control units(3) capable of moving independently. The masking blade control units independently move according to the position of a necessary chip inside a shot so that only the necessary chips are included in the device map.