REACTION FURNACE FOR FABRICATING SEMICONDUCTOR HAVING FUNCTION FOR PROTECTING THERMOCOUPLE

摘要

PURPOSE: A reaction furnace for fabricating a semiconductor having a function for protecting a thermocouple is provided to prevent a short circuit or open circuit of an anode line or cathode line of the thermocouple, by installing a fluctuating portion in an insulator of the thermocouple for detecting the temperature of a heating coil wherein the central portion of the fluctuating portion elastically fluctuates when a force is applied from the exterior. CONSTITUTION: A body(21) forms a heating chamber. The heating coil(24) heats the inside of the chamber, installed inside the body. The fluctuating portion(25d) of the thermocouple(25) in contact with the heating coil is flexible. The portion of the thermocouple having flexibility is made of a material which is elastic and heatproof.