发明名称 UV LASER CUTTING OR SHAPE MODIFICATION OF BRITTLE, HIGH MELTING TEMPERATURE TARGET MATERIALS SUCH AS CERAMICS OR GLASSES
摘要 <p>A UV laser cuts ceramics or glasses such as the alumina or ceramic of sliders (10), and particularly separates rows or sliders or rounds edges. A preferred process entails covering the surfaces of wafers, rows, or sliders with a sacrificial layer; removing a portion of the sacrificial layer to create uncovered zones along existing edges or over intended edges; laser cutting wafers into rows or rows into sliders; laser rounding edges, and/or corners; cleaning debris from the uncovered zones; and removing the sacrificial layer. Although a preferred laser is a Q-switched, UV solid-state laser providing imaged and/or shaped output at a bite size of between about 1 to 7 νm, other lasers including excimers can be employed.</p>
申请公布号 WO2002024396(A1) 申请公布日期 2002.03.28
申请号 US2001007661 申请日期 2001.03.09
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