| 摘要 |
PROBLEM TO BE SOLVED: To suppress thermocouples used in a semiconductor manufacturing device from deteriorating due to the repetition of a temperature change, to prolong the life of the thermocouples themselves, and to improve the quality of a semiconductor element. SOLUTION: The semiconductor manufacturing device is provided with a reactor core pipe 9 where a semiconductor wafer 5 is loaded inside, reaction gas is introduced and heat treatment is performed at a setting temperature, heat treatment heaters 3 which surround the reactor core pipe 9 and are divided into plural heaters and the respective thermocouples 4, which are installed for the divided heat treatment heaters 3 and control the temperature of the heat treatment heaters 3. A small cylindrical thermal heater 10, for thermally controlling the thermocouples 4 themselves are installed for the respective thermocouples 4 apart from the heat treatment heaters 3, so that the tip parts of the thermocouples are surrounded.
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