| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic actuator improved in the flatness inside of an electronic substrate surface to be formed with plates so as to improve the accuracy of a clearance for accurate flow-in/out of the fluid with the simple structure and capable of giving the directionality to the movement of a movable part at a low driving voltage with the excellent yield at a low cost, and to provide a method of manufacturing this electrostatic actuator, and to provide an ink jet recording device for recording the ink recording image of high quality and provided with the electrostatic actuator so as to restrict the unevenness of the dots. SOLUTION: This electrostatic actuator is formed of an inlet/outlet port 1 for making the fluid to flow-in/out, fluid chambers 2 of fluid passages communicated with the inlet/outlet port 1, diaphragms 3 forming wall surfaces of the fluid chambers 2, an electrode plate 4 arranged nonparallel and opposite to the diaphragm 3 through a clearance and for applying the voltage, and an electrode substrate 5 formed of a silicon (111) surface formed with the electrode plate 4.
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