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发明名称
摘要
申请公布号	JP3222615(B2)	申请公布日期	2001.10.29
申请号	JP19930096817	申请日期	1993.03.31
申请人		发明人
分类号	B01J19/08;C23C16/48;C23F4/00;H01L21/205;H01L21/302;H01L21/3065;H01L21/31;H05H1/46;(IPC1-7):H01L21/205;H01L21/306	主分类号	B01J19/08
代理机构		代理人
主权项
地址

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