Apparatus for wet etching the edge of a semiconductor wafer,申请号EP19990123323-传众专利搜索

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发明名称	Apparatus for wet etching the edge of a semiconductor wafer
摘要
申请公布号	EP1005064(B1)	申请公布日期	2001.09.19
申请号	EP19990123323	申请日期	1999.11.23
申请人	SEZ SEMICONDUCTOR-EQUIPMENT	发明人	SELLMER, REINHARD, DIPL.-ING.;KUMNIG, ROBERT
分类号	H01L21/306;H01L21/00;(IPC1-7):H01L21/00	主分类号	H01L21/306
代理机构		代理人
主权项
地址

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