DISPLACEMENT MEASURING APPARATUS AND MEASURING METHOD THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide a displacement measuring apparatus whose response speed is increased. SOLUTION: The displacement measuring apparatus A includes a receiving lens 3 for causing a light beam diffused and reflected by the surface of an object B for measurement to converge on the receiving surfaces of CCD elements 4a and 4b, a half mirror 9 for splitting the light beam impinging thereon via the receiving lens 3, and two CCD elements 4a and 4b allowing spot light beams split by the half mirror 9 to impinge on their respective receiving surfaces. A plurality of light receiving cells are arranged in a line on the receiving surface of each of the CCD elements 4a and 4b, and the CCD elements 4a and 4b are arranged so that of the plurality of light receiving cells, those in the same positional relationship are illuminated with the spot light. Before the output action of a detection signal by one of the CCD elements 4a (4b) ends, a CPU 5 initiates the output action of the detection signal by the other CCD element 4b (4a) and detects the position of the spot light from the detection signals of both CCD elements.