SCANNING ELECTRON MICROSCOPE

摘要

PURPOSE: A scanning electron microscope(SEM) is provided to minimize the attachment of a contaminant material and to prolong a component replacement period of a fixing aperture, by installing an aperture fixing plate used as a heating system at the fixing aperture constituting a gun chamber of the SEM. CONSTITUTION: The scanning electron microscope(SEM) is designed so that the first electrons generated in an electron gun is flowed into a sample room via a hollow hole(h) of a fixing aperture(40) and a penetration hole of a variable aperture. The fixing aperture comprises a thin molybdenum metal plate(42) of a doughnut type comprising the hollow hole, and a pair of aperture fixing plates(44) formed on both side walls of the metal plate respectively, to surround an outer circumference of the molybdenum metal plate. The aperture fixing plate is formed with a conductive material coated with gold.