发明名称 INTERFEROMETER
摘要 <p>PROBLEM TO BE SOLVED: To provide a device that can change the distance quickly and widely which a reference light beam travels across. SOLUTION: This interferometer 1 comprises a reference branching paths 5, 105 and measuring branching paths 3, 103. The reference branching paths 5, 105 have two reflecting surface 7, 113 facing each other. The reflecting surface 7, 113 are rotated around rotational shafts 9, 111 while holding their relative arrangement positions.</p>
申请公布号 JP2001153605(A) 申请公布日期 2001.06.08
申请号 JP20000310386 申请日期 2000.10.11
申请人 CARL ZEISS:FA 发明人 BEHREN JENS VON;HAUGER CHRISTOPH;HOELLER FRANK
分类号 G01B9/02;G01J3/453;(IPC1-7):G01B9/02 主分类号 G01B9/02
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