| 摘要 |
PROBLEM TO BE SOLVED: To provide a micromachine-type rotation angle accelerometer which requires only a comparatively simple electronic evaluation apparatus. SOLUTION: A ring-shaped flywheel mass body 10 is coupled to a central fixation device 20 via respective flexible spring devices 15a, 15b, 15c. The flywheel mass body 10 can be displaced elastically around a rotation axial line (z) from its standstill position by a rotation angle acceleration to be detected, First displaceable capacitor plate devices 101 to 106 are installed at the flywheel mass body 10. Second fixed capacitor plate devices 201 to 218 are installed on a substrate. Both capacitor plate devices are formed as differential capacitor devices which are used to detect a parameter (x) which expresses the rotation angle acceleration around the rotation axial line (z).
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