SUBSTRATE FIXING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a substrate fixing device capable of efficiently fixing a substrate to a rotated at a high speed. SOLUTION: This substrate fixing device 1 comprises a stage 5 which is rotary driven by a driving device placed with a wafer W (substrate) and fixing pawls 8 which are disposed on the stage 5 on a circle around the center of rotation thereof, retain the peripheral edge of the wafer W and fix the wafer to the stage and fixation releasing devices 9 which release the fixation of the wafer W by operating the fixing pawls 8. The fixing pawls 8 are disposed oscillatably on an approximately perpendicular plane passing the axis O of rotation of the stage 5. The oscillated top ends of the fixing pawls 8 are provided with engaging parts 19 for fixing the peripheral edge of the wafer W by engaging therewith. The fixing pawls 8 are subjected to weight distribution in such a manner that the centroid G thereof exists nearer the center-of-rotation side of the stage 5 than a perpendicular line V down from the center C of oscillation at the oscillated bottom ends.