| 摘要 |
Conveying a non-condensed material that is not in contact with the surroundings until its conversion into at least one product of the group selected from a product an intermediate product, a resulting product, a final product, a condensed product, a reaction product and a by-product comprises dropping the pressure to a distance controlled by a diaphragm using a sub-pressure produced by a suction stream in a chamber. An Independent claim is also included for an apparatus for carrying out the process containing a CVD/CVR reactor chamber.
|
