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发明名称
Method for transferring patterns with charged particle beam
摘要
申请公布号
EP0949654(A3)
申请公布日期
2001.01.31
申请号
EP19990109300
申请日期
1995.06.16
申请人
NIKON CORPORATION
发明人
NAKASUJI, MAMORU
分类号
H01J37/302;H01J37/317;(IPC1-7):H01J37/302
主分类号
H01J37/302
代理机构
代理人
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