Vibration distortion removal for scanning probe microscopes

摘要

A method for improving images of surface features of a sample, constructed by a scanning probe microscope, includes constructing images of surface features of a sample with a scanning probe microscope; measuring a displacement of the sample that occurs during the constructing step; and correcting the images using the measured displacement. An apparatus for improving images of surface features of a sample, constructed by a scanning probe microscope, includes a vacuum chamber; a sample holder disposed in the vacuum chamber; at least one spring connected between the vacuum chamber and the sample holder; at least one magnet disposed in the vacuum chamber for damping vibrations of the sample holder; a probe and piezo tube assembly disposed in the vacuum chamber for scanning surface features of a sample; and an interferometer disposed in the vacuum chamber wherein the interferometer measures a distance between the sample and a point fixed with respect to the sample.